Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5412209 | Electron beam apparatus | Tadashi Otaka, Akimitsu Okura, Hiroshi Iwamoto, Hideo Todokoro, Issei Tobita | 1995-05-02 |
| 4963735 | Plasma source mass spectrometer | Yukio Okamoto, Satoshi Shimura, Seiichi Murayama, Masataka Koga | 1990-10-16 |
| 4948962 | Plasma ion source mass spectrometer | Yasuhiro Mitsui, Satoshi Shimura | 1990-08-14 |
| 4912351 | Piezoelectric motor | Keiji Takata, Shigeyuki Hosoki, Sumio Hosaka | 1990-03-27 |
| 4829444 | Charged particle beam lithography system | Norio Saitou, Masahide Okumura, Mitsuo Ooyama | 1989-05-09 |
| 4692579 | Electron beam lithography apparatus | Norio Saitou, Susumu Ozasa, Masahide Okumura, Mitsuo Ooyama, Katsuhiro Harada +2 more | 1987-09-08 |
| 4626690 | Apparatus for chopping a charged particle beam | Hideo Todokoro | 1986-12-02 |
| 4193013 | Cathode for an electron source and a method of producing the same | Masaaki Futamoto, Ushio Kawabe, Shigeyuki Hosoki, Shigehiko Yamamoto | 1980-03-11 |