Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6511048 | Electron beam lithography apparatus and pattern forming method | Yasunari Sohda, Yasuhiro Someda, Hiroya Ohta, Norio Saitou, Yoshinori Nakayama | 2003-01-28 |
| 6225011 | Method for manufacturing semiconductor devices utilizing plurality of exposure systems | Yasuko Gotoh, Norio Hasegawa, Naoko Asai, Katsuya Hayano, Katsuhiro Kawasaki | 2001-05-01 |
| 5326979 | Electron beam lithography system | Katsuhiro Kawasaki, Hiroya Ohta, Toshihiko Kohno | 1994-07-05 |
| 4896514 | Air-conditioning apparatus | Akihiko Sugiyama | 1990-01-30 |
| 4897628 | Gas sensor and method of manufacturing the same | Masamichi Ippommatsu, Takeshi Matsumoto, Shingo Yakushizi, Katsuyuki Kuroki | 1990-01-30 |
| 4808829 | Mark position detection system for use in charged particle beam apparatus | Masahide Okumura, Genya Matsuoka, Kazumi Iwadate, Tadahito Matsuda, Ryoichi Yamaguchi | 1989-02-28 |
| 4701620 | Electron beam exposure apparatus | Masahide Okumura, Genya Matsuoka, Norio Saitou | 1987-10-20 |
| 4687435 | Pulse combustor | Toshihiko Saito, Satoshi Hisaoka | 1987-08-18 |
| 4642046 | Pulse combustor | Kazuo Saito, Mitsuyoshi Chiba, Shigeto Sumitani, Masami Yodo, Hiroyuki Araya | 1987-02-10 |
| 4577111 | Apparatus for electron beam lithography | Norio Saitou, Susumu Ozasa | 1986-03-18 |
| 4477246 | Silencer unit | Satoshi Hisaoka, Toshihiko Saito | 1984-10-16 |
| 4442682 | Turbine for use in refrigeration cycle | Hirotsugu Sakata, Shigemi Nagatomo | 1984-04-17 |
| 4414139 | Catalyst carriers for purification of waste gas and process for preparing the same | Toshio Ohtsuki, Minoru Komori, Tsutomu Sakuma | 1983-11-08 |
| 4382182 | Method of displaying an image of phase contrast in a scanning transmission electron microscope | Hideo Todokoro | 1983-05-03 |