Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7744447 | Abrasive disc | Noriomi Kodani, Akihiko Nagaya | 2010-06-29 |
| 6225011 | Method for manufacturing semiconductor devices utilizing plurality of exposure systems | Yasuko Gotoh, Norio Hasegawa, Naoko Asai, Katsuya Hayano, Takashi Matsuzaka | 2001-05-01 |
| 5759423 | Electron beam writing method and apparatus for carrying out the same | Yasunari Sohda, Yasuhiro Someda, Hiroyuki Itoh, Norio Saitou | 1998-06-02 |
| 5326979 | Electron beam lithography system | Takashi Matsuzaka, Hiroya Ohta, Toshihiko Kohno | 1994-07-05 |
| 5209813 | Lithographic apparatus and method | Yoshitada Oshida, Genya Matsuoka, Teruo Iwasaki, Toshio Kaneko, Hiroyuki Takahashi +2 more | 1993-05-11 |
| 4710640 | Electron beam lithography | — | 1987-12-01 |
| 4707950 | Ring grinding tool | — | 1987-11-24 |
| 4524277 | Charged particle beam apparatus | Yoshimasa Shimura, Hideyuki Kakiuchi, Yoshihisa Minamikawa | 1985-06-18 |