Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9858692 | Test support apparatus, test support method, and test support program for plant monitoring system | Motoko Yoshida, Naoto Odagawa | 2018-01-02 |
| 5424550 | Charged particle beam exposure apparatus | Masamichi Kawano, Masahide Okumura, Haruo Yoda, Yukinobu Shibata | 1995-06-13 |
| 5281827 | Charged particle beam exposure apparatus | Masamichi Kawano, Masahide Okumura, Haruo Yoda, Yukinobu Shibata | 1994-01-25 |
| 5206517 | Electron beam lithographic method | Yukinobu Shibata, Ikuo Takada, Akira Hirakawa | 1993-04-27 |
| 4221965 | Scanning type electron microscope | Yoshiharu Utsumi | 1980-09-09 |