Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5442183 | Charged particle beam apparatus including means for maintaining a vacuum seal | Hironobu Matsui, Mikio Ichihashi, Tadashi Otaka, Kazue Takahashi, Toshiaki Kobari +1 more | 1995-08-15 |
| 5254856 | Charged particle beam apparatus having particular electrostatic objective lens and vacuum pump systems | Hironobu Matsui, Mikio Ichihashi, Tadashi Otaka, Kazue Takahashi, Toshiaki Kobari +1 more | 1993-10-19 |
| 5177448 | Synchrotron radiation source with beam stabilizers | Takashi Ikeguchi, Manabu Matsumoto, Tadasi Sonobe, Toru Murashita, Satoshi Ido +2 more | 1993-01-05 |
| 5122175 | Method of and apparatus for producing superpure nitrogen | Shozi Koyama, Takazumi Ishizu, Junichi Hosokawa, Masahiro Yamazaki, Kanji Fujimori | 1992-06-16 |
| 5062771 | Vacuum system with a secondary gas also connected to the roughing pump for a semiconductor processing chamber | Akihiko Satou, Tadao Kusaka, Shigeo Tomiyama, Kouzi Aoki, Ichiro Gyobu +4 more | 1991-11-05 |
| 5020969 | Turbo vacuum pump | Masahiro Mase, Seiji Sakagami, Takeshi Okawada, Yoshihisa Awada, Takashi Nagaoka | 1991-06-04 |
| 4994753 | Synchrotron radiation source | Takashi Ikeguchi, Manabu Matsumoto, Tadasi Sonobe, Toru Murashita, Satoshi Ido +2 more | 1991-02-19 |
| 4853640 | Synchrotron radiation source | Manabu Matsumoto, Takashi Ikeguchi, Tadasi Sonobe, Toru Murashita, Satoshi Ido +4 more | 1989-08-01 |
| 4835114 | Method for LPCVD of semiconductors using oil free vacuum pumps | Akihiko Satou, Tadao Kusaka, Shigeo Tomiyama, Kouzi Aoki, Ichiro Gyobu +4 more | 1989-05-30 |
| 4732530 | Turbomolecular pump | Takeshi Okawada, Osami Matsushita, Kazuaki Nakamori | 1988-03-22 |