Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8502145 | Electron microscope system and method for evaluating film thickness reduction of resist patterns | Chie Shishido, Maki Tanaka | 2013-08-06 |
| 8357897 | Charged particle beam device | Chie Shishido, Atsushi Miyamoto, Tomofumi Nishiura, Go Kotaki | 2013-01-22 |
| 8217348 | Electron microscope system and method for evaluating film thickness reduction of resist patterns | Chie Shishido, Maki Tanaka | 2012-07-10 |
| 7817860 | Method and apparatus for measuring dimension using electron microscope | Chie Shishido, Hiroki Kawada | 2010-10-19 |
| 7460714 | Method and apparatus for measuring dimension using electron microscope | Chie Shishido, Hiroki Kawada | 2008-12-02 |
| 7269287 | Method and apparatus for measuring dimension using electron microscope | Chie Shishido, Hiroki Kawada | 2007-09-11 |