Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12228911 | Control apparatus of machining device and control method of the same | Junya Matsuda, Keiichi Shimizu | 2025-02-18 |
| 11733264 | Cantilever, scanning probe microscope, and measurement method using scanning probe microscope | Kaifeng Zhang, Takenori Hirose | 2023-08-22 |
| 8580039 | Surface treatment method of metal member and cleaning nozzle | Yoshiyuki Ando | 2013-11-12 |
| 8293648 | Mass production method of semiconductor integrated circuit device and manufacturing method of electronic device | Takuya Futase, Mieko Kashi | 2012-10-23 |
| 8071961 | Charged particle beam apparatus | Hiroaki Mito, Katsuhiro Sasada, Kazuo Kato, Tomohiro Kudo | 2011-12-06 |
| 8034717 | Mass production method of semiconductor integrated circuit device and manufacturing method of electronic device | Takuya Futase, Mieko Kashi | 2011-10-11 |
| 7964509 | Mass production method of semiconductor integrated circuit device and manufacturing method of electronic device | Takuya Futase, Mieko Kashi | 2011-06-21 |
| 7601974 | Charged particle beam apparatus | Hiroaki Mito, Katsuhiro Sasada, Kazuo Kato, Tomohiro Kudo, Yasuo Yahagi +1 more | 2009-10-13 |
| 7247864 | Charged particle beam apparatus | Hiroaki Mito, Katsuhiro Sasada, Kazuo Kato, Tomohiro Kudo | 2007-07-24 |
| 7205541 | Charged particle beam apparatus | Hiroaki Mito, Katsuhiro Sasada, Kazuo Kato, Tomohiro Kudo, Yasuo Yahagi +1 more | 2007-04-17 |
| 6737221 | Mass production method of semiconductor integrated circuit device and manufacturing method of electronic device | Takuya Futase, Mieko Kashi | 2004-05-18 |
| 6607988 | Manufacturing method of semiconductor integrated circuit device | Takashi Yunogami, Yoshitaka Nakamura, Kazuo Nojiri, Sukeyoshi Tsunekawa, Toshiyuki Arai +3 more | 2003-08-19 |
| 6586161 | Mass production method of semiconductor integrated circuit device and manufacturing method of electronic device | Takuya Futase, Mieko Kashi | 2003-07-01 |
| 6539959 | Cleaning apparatus for plate-like part and method thereof | Noriyuki Ohroku, Yuichirou Tanaka, Yoichi Takahara, Susumu Aiuchi, Hitoshi Oka +3 more | 2003-04-01 |