Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9551670 | Surface inspection apparatus and method thereof | Ichiro Ishimaru, Minori Noguchi, Ichiro Moriyama, Yoshikazu Tanabe, Yasuo Yatsugake +2 more | 2017-01-24 |
| 8729514 | Surface inspection apparatus and method thereof | Ichiro Ishimaru, Minori Noguchi, Ichiro Moriyama, Yoshikazu Tanabe, Yasuo Yatsugake +2 more | 2014-05-20 |
| 7977234 | Fabrication method of semiconductor integrated circuit device | Toshiyuki Arai, Ryousei Kawai, Fumiyuki Kanai, Shinichi Nakabayashi | 2011-07-12 |
| 7952085 | Surface inspection apparatus and method thereof | Ichiro Ishimaru, Minori Noguchi, Ichiro Moriyama, Yoshikazu Tanabe, Yasuo Yatsugake +2 more | 2011-05-31 |
| 7718526 | Fabrication method of semiconductor integrated circuit device | Toshiyuki Arai, Ryousei Kawai, Fumiyuki Kanai, Shinichi Nakabayashi | 2010-05-18 |
| 7417244 | Surface inspection apparatus and method thereof | Ichiro Ishimaru, Minori Noguchi, Ichiro Moriyama, Yoshikazu Tanabe, Yasuo Yatsugake +2 more | 2008-08-26 |
| 7250365 | Fabrication method of semiconductor integrated circuit device | Toshiyuki Arai, Ryousei Kawai, Fumiyuki Kanai, Shinichi Nakabayashi | 2007-07-31 |
| 7242016 | Surface inspection apparatus and method thereof | Ichiro Ishimaru, Minori Noguchi, Ichiro Moriyama, Yoshikazu Tanabe, Yasuo Yatsugake +2 more | 2007-07-10 |
| 7234998 | Chemical mechanical polishing method, chemical mechanical polishing system, and manufacturing method of semiconductor device | Masahiro Aoyagi, Aki Nakajo, Shinobu Nakamura | 2007-06-26 |
| 6979649 | Fabrication method of semiconductor integrated circuit device | Toshiyuki Arai, Ryousei Kawai, Fumiyuki Kanai, Shinichi Nakabayashi | 2005-12-27 |
| 6979650 | Fabrication method of semiconductor integrated circuit device | Shinichi Nakabayshi, Hisahiko Abe, Masaki Hiyama, Takashi Nishiguchi | 2005-12-27 |
| 6894302 | Surface inspection apparatus and method thereof | Ichiro Ishimaru, Minori Noguchi, Ichiro Moriyama, Yoshikazu Tanabe, Yasuo Yatsugake +2 more | 2005-05-17 |
| 6806970 | Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same | Takenori Hirose, Minori Noguchi, Yukio Kenbo, Shunji Maeda, Takanori Ninomiya | 2004-10-19 |
| 6753972 | Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same | Takenori Hirose, Minori Noguchi, Yukio Kenbo, Shunji Maeda, Takanori Ninomiya | 2004-06-22 |
| 6468817 | Semiconductor integrated circuit device manufacturing method including chemical mechanical polishing, and detection and evaluation of microscratches caused thereby | Shinichi Nakabayashi, Hisahiko Abe, Yukio Kenbo, Yoshiteru Katsumura | 2002-10-22 |