| 7604925 |
Exposure apparatus and method |
Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka |
2009-10-20 |
| 7598020 |
Exposure apparatus and method |
Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka |
2009-10-06 |
| 7277155 |
Exposure apparatus and method |
Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka |
2007-10-02 |
| 7012671 |
Exposure apparatus and method |
Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka |
2006-03-14 |
| 6485891 |
Exposure apparatus and method |
Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka |
2002-11-26 |
| 6335146 |
Exposure apparatus and method |
Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka |
2002-01-01 |
| 6016187 |
Exposure apparatus and method |
Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka |
2000-01-18 |
| 5767949 |
Exposure apparatus and method |
Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka |
1998-06-16 |
| 5526094 |
Exposure apparatus and method |
Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka |
1996-06-11 |
| 5329333 |
Exposure apparatus and method |
Minori Noguchi, Yukio Kenbo, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka |
1994-07-12 |
| 5302999 |
Illumination method, illumination apparatus and projection exposure apparatus |
Yoshitada Oshida, Tutomu Tawa, Yukihiro Shibata, Shigemi Ishii, Minori Noguchi +1 more |
1994-04-12 |