Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9213322 | Methods for providing run to run process control using a dynamic tuner | Jian-Huei Feng, Ming Jiang, Clayton R. Newman | 2015-12-15 |
| 9110465 | Methods for providing asymmetric run to run control of process parameters | Jian-Huei Feng, Ming Jiang, Clayton R. Newman | 2015-08-18 |
| 7914657 | Controlling the thickness of wafers during the electroplating process | Wai B. Fu, Hieu Lam, Shahram Y. Mehdizadeh | 2011-03-29 |
| 7809459 | Advanced-process-control system utilizing a lambda tuner | Toshihiro Morisawa, Andrew C. Walker | 2010-10-05 |
| 7722436 | Run-to-run control of backside pressure for CMP radial uniformity optimization based on center-to-edge model | Hung-Chin Guthrie, Ming Jiang | 2010-05-25 |
| 7269526 | Aggregated run-to-run process control for wafer yield optimization | Amelia Clara Muro, Andrew C. Walker | 2007-09-11 |
| 7264535 | Run-to-run control of backside pressure for CMP radial uniformity optimization based on center-to-edge model | Hung-Chin Guthrie, Ming Jiang | 2007-09-04 |
| 7254884 | Method for fabricating a pole tip in a magnetic transducer using feed-forward and feedback | Negar Karimi, John I. Kim, Andrew C. Walker | 2007-08-14 |