Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048326 | Method and apparatus for determining an etch property using an endpoint signal | Hongyu Yue | 2011-11-01 |
| 7914657 | Controlling the thickness of wafers during the electroplating process | Wai B. Fu, Shahram Y. Mehdizadeh, Yeak-Chong Wong | 2011-03-29 |
| 7844559 | Method and system for predicting process performance using material processing tool and sensor data | Hongyu Yue, John Christopher Shriner | 2010-11-30 |
| 7713760 | Process system health index and method of using the same | Hongyu Yue | 2010-05-11 |
| 7430496 | Method and apparatus for using a pressure control system to monitor a plasma processing system | Hongyu Yue | 2008-09-30 |
| 7213478 | Method for automatic configuration of processing system | Satoshi Harada, Edward C. Hume, III, James E. Willis, Kevin Andrew Chamness, Hongyu Yue +1 more | 2007-05-08 |
| 7211196 | Method and system of discriminating substrate type | Hongyu Yue | 2007-05-01 |
| 7167766 | Controlling a material processing tool and performance data | Hongyu Yue | 2007-01-23 |
| 6825920 | Method and system of determining chamber seasoning condition by optical emission | Hongyu Yue, John Christopher Shriner | 2004-11-30 |