Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9213322 | Methods for providing run to run process control using a dynamic tuner | Jian-Huei Feng, Ming Jiang, Yeak-Chong Wong | 2015-12-15 |
| 9110465 | Methods for providing asymmetric run to run control of process parameters | Jian-Huei Feng, Ming Jiang, Yeak-Chong Wong | 2015-08-18 |
| 7371152 | Non-uniform subaperture polishing | — | 2008-05-13 |