Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368031 | Plasma processing method | Kosa Hirota, Masahiro Sumiya, Nanako Tamari, Satomi Inoue, Shigeru Nakamoto | 2025-07-22 |
| 11355324 | Plasma processing method | Kosa Hirota, Masahiro Sumiya, Nanako Tamari, Satomi Inoue, Shigeru Nakamoto | 2022-06-07 |
| 6960533 | Method of processing a sample surface having a masking material and an anti-reflective film using a plasma | Masatoshi Oyama | 2005-11-01 |