Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131964 | Plasma processing apparatus and plasma processing method | Kousuke Fukuchi, Soichiro Eto, Tsubasa Okamoto, Tatehito Usui, Shigeru Nakamoto | 2024-10-29 |
| 12062530 | Vacuum processing apparatus and vacuum processing method | Yusuke Yoshida, Shigeru Nakamoto, Kosuke Fukuchi | 2024-08-13 |
| 12051575 | Plasma processing apparatus and plasma processing method | Tsubasa Okamoto, Soichiro Eto | 2024-07-30 |
| 12014909 | Plasma processing apparatus and plasma processing system | Shota Umeda, Daisuke Shiraishi, Akira Kagoshima, Satomi Inoue | 2024-06-18 |
| 11538671 | Plasma processing apparatus and data analysis apparatus | Kenji Tamaki, Akira Kagoshima, Daisuke Shiraishi, Masahiro Sumiya | 2022-12-27 |
| 11437289 | Plasma processing apparatus and plasma processing method | Kousuke Fukuchi, Soichiro Eto, Tsubasa Okamoto, Tatehito Usui, Shigeru Nakamoto | 2022-09-06 |
| 11410836 | Analysis method and semiconductor etching apparatus | Kenji Tamaki, Akira Kagoshima, Daisuke Shiraishi | 2022-08-09 |
| 11404253 | Plasma processing apparatus and analysis method for analyzing plasma processing data | Daisuke Shiraishi, Akira Kagoshima, Satomi Inoue | 2022-08-02 |
| 10872750 | Plasma processing apparatus and plasma processing system | Shota Umeda, Daisuke Shiraishi, Akira Kagoshima, Satomi Inoue | 2020-12-22 |
| 10734207 | Plasma processing apparatus and analysis method for analyzing plasma processing data | Daisuke Shiraishi, Akira Kagoshima, Satomi Inoue | 2020-08-04 |
| 10510519 | Plasma processing apparatus and data analysis apparatus | Kenji Tamaki, Akira Kagoshima, Daisuke Shiraishi, Masahiro Sumiya | 2019-12-17 |
| 10408762 | Plasma processing apparatus, plasma processing method and plasma processing analysis method | Kenji Tamaki, Daisuke Shiraishi, Akira Kagoshima, Satomi Inoue | 2019-09-10 |
| 10262842 | Analysis method and semiconductor etching apparatus | Kenji Tamaki, Akira Kagoshima, Daisuke Shiraishi | 2019-04-16 |
| 9897999 | Setting operation control in parts mounting device by reducing a variation of a distance value | Kenji Tamaki, Masahiro Hoshino, Hiroto Sekiguchi, Tomise Koyama | 2018-02-20 |
| 9464936 | Plasma processing apparatus and analyzing apparatus | Akira Kagoshima, Daisuke Shiraishi, Kenji Tamaki | 2016-10-11 |
| 9443704 | Data analysis method for plasma processing apparatus, plasma processing method and plasma processing apparatus | Kenji Tamaki, Akira Kagoshima, Daisuke Shiraishi | 2016-09-13 |
| 9324588 | Data analysis method for plasma processing apparatus, plasma processing method and plasma processing apparatus | Kenji Tamaki, Akira Kagoshima, Daisuke Shiraishi | 2016-04-26 |
| 9091595 | Analysis method, analysis device, and etching processing system | Kenji Tamaki, Akira Kagoshima, Daisuke Shiraishi, Toshio Masuda | 2015-07-28 |