Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9865439 | Plasma processing apparatus | Shigeru Nakamoto, Tatehito Usui, Kousuke Fukuchi | 2018-01-09 |
| 9805940 | Plasma processing apparatus and plasma processing method | Kousuke Fukuchi, Shigeru Nakamoto, Tatehito Usui | 2017-10-31 |
| 9767997 | Plasma processing apparatus and operational method thereof | Masahito Togami, Tatehito Usui, Kosa Hirota, Shigeru Nakamoto | 2017-09-19 |
| 9741629 | Plasma processing apparatus and plasma processing method | Tatehito Usui, Kosa Hirota, Shigeru Nakamoto, Kousuke Fukuchi | 2017-08-22 |
| 9507328 | Processing chamber allocation setting device and processing chamber allocation setting program | Teruo Nakata, Keita Nogi | 2016-11-29 |
| 9257318 | Operation method for vacuum processing apparatus | Michinori Kawaguchi, Yoshiro Suemitsu, Keita Nogi | 2016-02-09 |
| 9190336 | Plasma processing apparatus and plasma processing method | Kousuke Fukuchi, Shigeru Nakamoto, Tatehito Usui, Kousa Hirota | 2015-11-17 |
| 9110461 | Semiconductor manufacturing equipment | Toshihiro Morisawa, Daisuke Shiraishi, Akira Kagoshima | 2015-08-18 |
| 8992721 | Plasma processing apparatus | Akira Kagoshima, Daisuke Shiraishi, Shigeru Nakamoto, Shoji Ikuhara, Toshihiro Morisawa | 2015-03-31 |
| 8924001 | Etching apparatus, control simulator, and semiconductor device manufacturing method | Toshihiro Morisawa, Daisuke Shiraishi, Akira Kagoshima | 2014-12-30 |
| 8812151 | Vacuum process device and vacuum process method | Teruo Nakata, Keita Nogi, Michinori Kawaguchi | 2014-08-19 |
| 8784677 | Plasma processing apparatus and plasma processing method | Daisuke Shiraishi, Akira Kagoshima, Shigeru Nakamoto | 2014-07-22 |
| 8588962 | Vacuum processing device and method of transporting process subject member | Keita Nogi, Teruo Nakata, Yoshiro Suemitsu, Michinori Kawaguchi | 2013-11-19 |
| 8486290 | Etching apparatus, analysis apparatus, etching treatment method, and etching treatment program | Toshihiro Morisawa, Daisuke Shiraishi | 2013-07-16 |