Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062564 | Operating method of vacuum processing apparatus | Daichi Naiki, Shinichiro Numata | 2024-08-13 |
| 11164766 | Operating method of vacuum processing apparatus | Yoshikazu Saigou, Hiroyuki Ishikawa | 2021-11-02 |
| 9257318 | Operation method for vacuum processing apparatus | Michinori Kawaguchi, Satomi Inoue, Keita Nogi | 2016-02-09 |
| 8588962 | Vacuum processing device and method of transporting process subject member | Keita Nogi, Teruo Nakata, Michinori Kawaguchi, Satomi Inoue | 2013-11-19 |