Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9257318 | Operation method for vacuum processing apparatus | Satomi Inoue, Yoshiro Suemitsu, Keita Nogi | 2016-02-09 |
| 8812151 | Vacuum process device and vacuum process method | Teruo Nakata, Keita Nogi, Satomi Inoue | 2014-08-19 |
| 8588962 | Vacuum processing device and method of transporting process subject member | Keita Nogi, Teruo Nakata, Yoshiro Suemitsu, Satomi Inoue | 2013-11-19 |
| 7353076 | Vacuum processing method and vacuum processing apparatus | Nobuo Nagayasu, Hideki Kihara, Yuuzou Oohirabaru | 2008-04-01 |