Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE39895 | Semiconductor integrated circuit arrangement fabrication method | Takafumi Tokunaga, Sadayuki Okudaira, Kazutami Tago, Hideyuki Kazumi, Ken Yoshioka | 2007-10-23 |
| 7259104 | Sample surface processing method | Tetsuo Ono, Takafumi Tokunaga, Tadashi Umezawa, Motohiko Yoshigai, Tokuo Kure +3 more | 2007-08-21 |
| 7049243 | Surface processing method of a specimen and surface processing apparatus of the specimen | Tetsuo Ono, Yasuhiro Nishimori, Takashi Sato, Naoyuki Kofuji, Masaru Izawa +7 more | 2006-05-23 |
| 6849191 | Method and apparatus for treating surface of semiconductor | Tetsuo Ono, Ryouji Hamasaki, Tokuo Kure, Takafumi Tokunaga, Masayuki Kojima | 2005-02-01 |
| 6767838 | Method and apparatus for treating surface of semiconductor | Tetsuo Ono, Ryouji Hamasaki, Tokuo Kure, Takafumi Tokunaga, Masayuki Kojima | 2004-07-27 |
| 6677244 | Specimen surface processing method | Tetsuo Ono, Yasuhiro Nishimori, Takashi Sato, Naoyuki Kofuji, Masaru Izawa +7 more | 2004-01-13 |
| 6660647 | Method for processing surface of sample | Tetsuo Ono, Takafumi Tokunaga, Tadashi Umezawa, Motohiko Yoshigai, Tokuo Kure +3 more | 2003-12-09 |
| 6492277 | Specimen surface processing method and apparatus | Tetsuo Ono, Yasuhiro Nishimori, Takashi Sato, Naoyuki Kofuji, Masaru Izawa +7 more | 2002-12-10 |
| 6332425 | Surface treatment method and system | Naoyuki Kofuji, Shin Arai, Kazunori Tsujimoto, Keizo Suzuki, Kenichi Mizuishi | 2001-12-25 |
| 6309980 | Semiconductor integrated circuit arrangement fabrication method | Takafumi Tokunaga, Sadayuki Okudaira, Kazutami Tago, Hideyuki Kazumi, Ken Yoshioka | 2001-10-30 |
| 6231777 | Surface treatment method and system | Naoyuki Kofuji, Shin Arai, Kazunori Tsujimoto, Keizo Suzuki, Kenichi Mizuishi | 2001-05-15 |
| 6074958 | Semiconductor integrated circuit arrangement fabrication method | Takafumi Tokunaga, Sadayuki Okudaira, Kazutami Tago, Hideyuki Kazumi, Ken Yoshioka | 2000-06-13 |
| 5962347 | Semiconductor integrated circuit arrangement fabrication method | Takafumi Tokunaga, Sadayuki Okudaira, Kazutami Tago, Hideyuki Kazumi, Ken Yoshioka | 1999-10-05 |
| 5874013 | Semiconductor integrated circuit arrangement fabrication method | Takafumi Tokunaga, Sadayuki Okudaira, Kazutami Tago, Hideyuki Kazumi, Ken Yoshioka | 1999-02-23 |
| 5554257 | Method of treating surfaces with atomic or molecular beam | Kenetsu Yokogawa, Yoshimi Kawanami | 1996-09-10 |
| 5462635 | Surface processing method and an apparatus for carrying out the same | Tetsuo Ono, Keizo Suzuki | 1995-10-31 |
| 5314839 | Solid state device fabrication method including a surface treatment step with a neutral particle beam with an energy between 10ev and 100ev | Takashi Yunogami, Kenetsu Yokokawa, Nobuyoshi Kobayashi | 1994-05-24 |
| 5284544 | Apparatus for and method of surface treatment for microelectronic devices | Takashi Yunogami | 1994-02-08 |
| 5241186 | Surface treatment method and apparatus therefor | Takashi Yunogami, Keizo Suzuki | 1993-08-31 |
| 5140272 | Method of semiconductor surface measurment and an apparatus for realizing the same | Shigeru Nishimatsu, Ryo Haruta, Kanji Tsujii, Chusuke Munakata, Shigeyuki Hosoki | 1992-08-18 |
| 5108778 | Surface treatment method | Keizo Suzuki, Susumu Hiraoka, Shigeru Nishimatsu | 1992-04-28 |
| 4511429 | Process for dry etching of aluminum and its alloy | Toshihide Ohgata, Hideo Komatsu | 1985-04-16 |
| 4412119 | Method for dry-etching | Hideo Komatsu, Shinya Iida, Kazuyoshi Ueki | 1983-10-25 |
| 4352974 | Plasma etcher having isotropic subchamber with gas outlet for producing uniform etching | Norio Kanai, Kunio Harada, Hideo Komatsu, Shinya Iida | 1982-10-05 |
| 4308089 | Method for preventing corrosion of Al and Al alloys | Shinya Iida, Kazuyoshi Ueki, Hideo Komatsu, Kado Hirobe | 1981-12-29 |