Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5140272 | Method of semiconductor surface measurment and an apparatus for realizing the same | Shigeru Nishimatsu, Tatsumi Mizutani, Ryo Haruta, Chusuke Munakata, Shigeyuki Hosoki | 1992-08-18 |
| 4936252 | Equipment for manufacturing semiconductor devices | Yusuke Yajima, Hidekazu Okuhira, Seiichi Murayama, Akira Shintani, Yasuo Wada | 1990-06-26 |
| 4887037 | Electron spin resonance spectrometer | Yusuke Yajima | 1989-12-12 |
| 4716852 | Apparatus for thin film formation using photo-induced chemical reaction | Yusuke Yajima, Seiichi Murayama | 1988-01-05 |
| 4678536 | Method of photochemical surface treatment | Seiichi Murayama, Yusuke Yajima | 1987-07-07 |
| 4653908 | Grazing incidence reflection spectrometer | Yusuke Yajima, Seiichi Murayama | 1987-03-31 |
| 4643799 | Method of dry etching | Yusuke Yajima, Seiichi Murayama | 1987-02-17 |
| 4615756 | Dry etching apparatus | Yusuke Yajima, Seiichi Murayama | 1986-10-07 |