TO

Tomihito Ohba

Lam Research: 1 patents #1,364 of 2,128Top 65%
Overall (All Time): #2,905,182 of 4,157,543Top 70%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
10056264 Atomic layer etching of GaN and other III-V materials Wenbing Yang, Samantha Tan, Keren Jacobs Kanarik, Jeffrey Marks, Kazuo Nojiri 2018-08-21