Atomic layer etching for subtractive metal etch

Assignee

• Lam Research

Inventors

• Wenbing Yang (27 patents)
• Mohand Brouri (4 patents)
• Unknown
• Shih-Ked Lee (38 patents)
• Yiwen FAN (5 patents)
• Wook Choi (11 patents)
• Tamal Mukherjee (8 patents)
• Ran Lin (34 patents)
• Yang Pan (161 patents)

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