Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12331396 | Systems and methods for homogenous intermixing of precursors in alloy atomic layer deposition | Raashina Humayun, Michal Danek, Patrick A. Van Cleemput, Shruti Vivek Thombare | 2025-06-17 |
| 12305278 | Method of reducing titanium nitride etching during tungsten film formation | Kedi Wu, Chenfei Shen, Chi-Chou Lin, Shih Chung Chen, Mandyam Sriram +1 more | 2025-05-20 |
| 12062545 | Fluorine-free tungsten ALD for dielectric selectivity improvement | Chi-Chou Lin, Kedi Wu, Wen-Ting Chen, Shih Chung Chen, Srinivas Gandikota +4 more | 2024-08-13 |
| 11827976 | Systems and methods for homogenous intermixing of precursors in alloy atomic layer deposition | Raashina Humayun, Michal Danek, Patrick A. Van Cleemput, Shruti Vivek Thombare | 2023-11-28 |