Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12305278 | Method of reducing titanium nitride etching during tungsten film formation | Chenfei Shen, Chi-Chou Lin, Ilanit Fisher, Shih Chung Chen, Mandyam Sriram +1 more | 2025-05-20 |
| 12062545 | Fluorine-free tungsten ALD for dielectric selectivity improvement | Ilanit Fisher, Chi-Chou Lin, Wen-Ting Chen, Shih Chung Chen, Srinivas Gandikota +4 more | 2024-08-13 |