Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12269924 | Polyimide film and manufacturing method thereof | Bo-Hung Lai, Tang-Chieh Huang | 2025-04-08 |
| 11049716 | Gap fill using carbon-based films | Jason D. Park, Bart J. van Schravendijk, Shu Tsai Wang, Kaihan Ashtiani | 2021-06-29 |
| 9966255 | Method of densifying films in semiconductor device | Bart J. van Schravendijk | 2018-05-08 |
| 9966299 | Inhibitor plasma mediated atomic layer deposition for seamless feature fill | Bart J. van Schravendijk, Jun Qian, Hu Kang, Adrien LaVoie, Deenesh Padhi +1 more | 2018-05-08 |
| 9786496 | Method of densifying films in semiconductor device | Bart J. van Schravendijk | 2017-10-10 |
| 9425078 | Inhibitor plasma mediated atomic layer deposition for seamless feature fill | Bart J. van Schravendijk, Jun Qian, Hu Kang, Adrien LaVoie, Deenesh Padhi +1 more | 2016-08-23 |
| 9406544 | Systems and methods for eliminating seams in atomic layer deposition of silicon dioxide film in gap fill applications | Jason D. Park, Bart J. van Schravendijk, Kaihan Ashtiani | 2016-08-02 |