| 11869770 |
Selective deposition of etch-stop layer for enhanced patterning |
Nagraj Shankar, Kapu Sirish Reddy, Jon Henri, Pengyi Zhang, Bhavin Jariwala +1 more |
2024-01-09 |
| 11584986 |
Area selective CVD of metallic films using precursor gases and inhibitors |
John R. Abelson, Gregory S. Girolami, Sumeng Liu, Zhejun Zhang |
2023-02-21 |
| 11094542 |
Selective deposition of etch-stop layer for enhanced patterning |
Nagraj Shankar, Kapu Sirish Reddy, Jon Henri, Pengyi Zhang, Bhavin Jariwala +1 more |
2021-08-17 |
| 10745806 |
Showerhead with air-gapped plenums and overhead isolation gas distributor |
Nagraj Shankar, Jeffrey Womack, Meliha Gozde Rainville, Emile C. Draper, Pankaj G. Ramnani +3 more |
2020-08-18 |
| 10643889 |
Pre-treatment method to improve selectivity in a selective deposition process |
Dennis M. Hausmann, Pengyi Zhang, Paul C. Lemaire, Kashish Sharma, Alexander R. Fox +3 more |
2020-05-05 |
| 10566194 |
Selective deposition of etch-stop layer for enhanced patterning |
Nagraj Shankar, Kapu Sirish Reddy, Jon Henri, Pengyi Zhang, Bhavin Jariwala +1 more |
2020-02-18 |
| 10472716 |
Showerhead with air-gapped plenums and overhead isolation gas distributor |
Nagraj Shankar, Jeffrey Womack, Meliha Gozde Rainville, Emile C. Draper, Pankaj G. Ramnani +3 more |
2019-11-12 |
| 10103057 |
Use of an inhibitor molecule in chemical vapor deposition to afford deposition of copper on a metal substrate with no deposition on adjacent SIO2 substrate |
John R. Abelson, Shaista Babar, Gregory S. Girolami |
2018-10-16 |
