Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11869770 | Selective deposition of etch-stop layer for enhanced patterning | Nagraj Shankar, Kapu Sirish Reddy, Jon Henri, Pengyi Zhang, Bhavin Jariwala +1 more | 2024-01-09 |
| 11584986 | Area selective CVD of metallic films using precursor gases and inhibitors | John R. Abelson, Gregory S. Girolami, Sumeng Liu, Zhejun Zhang | 2023-02-21 |
| 11094542 | Selective deposition of etch-stop layer for enhanced patterning | Nagraj Shankar, Kapu Sirish Reddy, Jon Henri, Pengyi Zhang, Bhavin Jariwala +1 more | 2021-08-17 |
| 10745806 | Showerhead with air-gapped plenums and overhead isolation gas distributor | Nagraj Shankar, Jeffrey Womack, Meliha Gozde Rainville, Emile C. Draper, Pankaj G. Ramnani +3 more | 2020-08-18 |
| 10643889 | Pre-treatment method to improve selectivity in a selective deposition process | Dennis M. Hausmann, Pengyi Zhang, Paul C. Lemaire, Kashish Sharma, Alexander R. Fox +3 more | 2020-05-05 |
| 10566194 | Selective deposition of etch-stop layer for enhanced patterning | Nagraj Shankar, Kapu Sirish Reddy, Jon Henri, Pengyi Zhang, Bhavin Jariwala +1 more | 2020-02-18 |
| 10472716 | Showerhead with air-gapped plenums and overhead isolation gas distributor | Nagraj Shankar, Jeffrey Womack, Meliha Gozde Rainville, Emile C. Draper, Pankaj G. Ramnani +3 more | 2019-11-12 |
| 10103057 | Use of an inhibitor molecule in chemical vapor deposition to afford deposition of copper on a metal substrate with no deposition on adjacent SIO2 substrate | John R. Abelson, Shaista Babar, Gregory S. Girolami | 2018-10-16 |