Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6242111 | Anodized aluminum susceptor for forming integrated circuit structures and method of making anodized aluminum susceptor | Craig Bercaw | 2001-06-05 |
| 5997950 | Substrate having uniform tungsten silicide film and method of manufacture | Meng Chu Tseng, Michio Aruga, Klaus-Dieter Rinnen | 1999-12-07 |
| 5643633 | Uniform tungsten silicide films produced by chemical vapor depostiton | Meng Chu Tseng, Michio Aruga, Moshe Eizenberg | 1997-07-01 |
| 5558910 | Uniform tungsten silicide films produced by chemical vapor deposition | Meng Chu Tseng, Michio Aruga, Moshe Eizenberg | 1996-09-24 |
| 5500249 | Uniform tungsten silicide films produced by chemical vapor deposition | Meng Chu Tseng, Michio Aruga | 1996-03-19 |