| 8852349 |
Wafer processing hardware for epitaxial deposition with reduced auto-doping and backside defects |
Roger N. Anderson, Kailash Kiran Patalay, Craig Metzner |
2014-10-07 |
| 8735772 |
Method and apparatus for improved laser scribing of opto-electric devices |
Irving Chyr, Jonathan D. Halderman |
2014-05-27 |
| 8372203 |
Apparatus temperature control and pattern compensation |
Aaron Muir Hunter, Craig Metzner, Roger N. Anderson |
2013-02-12 |
| 7704327 |
High temperature anneal with improved substrate support |
Ann Waldhauer, Brian H. Burrows |
2010-04-27 |
| 7700376 |
Edge temperature compensation in thermal processing particularly useful for SOI wafers |
Sairaju Tallavajula, Sundar Ramamurthy |
2010-04-20 |
| 7691204 |
Film formation apparatus and methods including temperature and emissivity/pattern compensation |
Aaron Muir Hunter, Craig Metzner, Roger N. Anderson |
2010-04-06 |
| 6916744 |
Method and apparatus for planarization of a material by growing a sacrificial film with customized thickness profile |
Vedapuram S. Achutharaman, Hali Forstner |
2005-07-12 |
| 6344631 |
Substrate support assembly and processing apparatus |
— |
2002-02-05 |
