Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10610884 | Substrate processing system having susceptorless substrate support with enhanced substrate heating control | Joseph M. Ranish | 2020-04-07 |
| 10376916 | Substrate processing system having susceptorless substrate support with enhanced substrate heating control | Joseph M. Ranish | 2019-08-13 |
| 10345155 | Model based lamp background filtration of stray radiation for pyrometry | Aaron Muir Hunter | 2019-07-09 |
| 10306708 | Absorbing reflector for semiconductor processing chamber | Kin Pong Lo, Paul Brillhart, Balasubramanian Ramachandran, Satheesh Kuppurao, Daniel Redfield +6 more | 2019-05-28 |
| 9832816 | Absorbing reflector for semiconductor processing chamber | Kin Pong Lo, Paul Brillhart, Balasubramanian Ramachandran, Satheesh Kuppurao, Daniel Redfield +6 more | 2017-11-28 |
| 9768043 | Quartz upper and lower domes | Anzhong Chang, Paul Brillhart, Surajit Kumar, Satheesh Kuppurao, Mehmet Tugrul Samir +9 more | 2017-09-19 |
| 9739666 | Model based lamp background filtration of stray radiation for pyrometry | Aaron Muir Hunter | 2017-08-22 |
| 9682398 | Substrate processing system having susceptorless substrate support with enhanced substrate heating control | Joseph M. Ranish | 2017-06-20 |
| 9570328 | Substrate support for use with multi-zonal heating sources | Errol Antonio C. Sanchez | 2017-02-14 |
| 8967860 | Low temperature measurement and control using low temperature pyrometry | — | 2015-03-03 |
| 8951351 | Wafer processing hardware for epitaxial deposition with reduced backside deposition and defects | Craig Metzner, Jean R. Vatus | 2015-02-10 |
| 8852349 | Wafer processing hardware for epitaxial deposition with reduced auto-doping and backside defects | Juan Chacin, Roger N. Anderson, Craig Metzner | 2014-10-07 |
| 8747560 | System and method for pedestal adjustment | Richard O. Collins, Jean R. Vatus, Zhepeng CONG | 2014-06-10 |
| 8726837 | Semiconductor process chamber vision and monitoring system | Craig Metzner, David K. Carlson | 2014-05-20 |
| 8724976 | Use of infrared camera for real-time temperature monitoring and control | Nir Merry, Stephen Moffatt, David K. Carlson | 2014-05-13 |
| 8663390 | Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems | David K. Carlson, Satheesh Kuppurao, Howard Beckford, Herman Diniz, Brian H. Burrows +4 more | 2014-03-04 |
| 8512472 | Method and apparatus to enhance process gas temperature in a CVD reactor | Jean R. Vatus | 2013-08-20 |
| 8441640 | Non-contact substrate support position sensing system and corresponding adjustments | Richard O. Collins, Jean R. Vatus, Zhepeng CONG | 2013-05-14 |
| 8398777 | System and method for pedestal adjustment | Richard O. Collins, Jean R. Vatus, Zhepeng CONG | 2013-03-19 |
| 8150242 | Use of infrared camera for real-time temperature monitoring and control | Nir Merry, Stephen Moffatt, David K. Carlson | 2012-04-03 |
| 8147137 | Pyrometry for substrate processing | Aaron Muir Hunter, Bruce E. Adams | 2012-04-03 |
| 7976634 | Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems | David K. Carlson, Satheesh Kuppurao, Howard Beckford, Herman Diniz, Brian H. Burrows +4 more | 2011-07-12 |
| 7964038 | Apparatus for improved azimuthal thermal uniformity of a substrate | Jean R. Vatus, Dean Berlin | 2011-06-21 |