Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12037701 | Multi-thermal CVD chambers with shared gas delivery and exhaust system | Zhiyuan Ye, Shu-Kwan LAU, Brian H. Burrows, Lori D. Washington, Martin A. Hilkene +4 more | 2024-07-16 |
| 9768043 | Quartz upper and lower domes | Anzhong Chang, Paul Brillhart, Surajit Kumar, Satheesh Kuppurao, Mehmet Tugrul Samir +9 more | 2017-09-19 |
| 8663390 | Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems | David K. Carlson, Satheesh Kuppurao, Howard Beckford, Kailash Kiran Patalay, Brian H. Burrows +4 more | 2014-03-04 |
| 7976634 | Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems | David K. Carlson, Satheesh Kuppurao, Howard Beckford, Kailash Kiran Patalay, Brian H. Burrows +4 more | 2011-07-12 |
| 6911401 | Method for CVD process control for enhancing device performance | Shahab Khandan, Christopher Fulmer, Lori D. Washington, Lance A. Scudder, Arkadii V. Samoilov | 2005-06-28 |
| 6342453 | Method for CVD process control for enhancing device performance | Shahab Khandan, Christopher Fulmer, Lori D. Washington, Lance A. Scudder, Arkadii V. Samoilov | 2002-01-29 |