Issued Patents All Time
Showing 1–25 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11915950 | Multi-zone semiconductor substrate supports | Dongqing Yang, Dmitry Lubomirsky, Peter M. Hillman, Soonam Park, Martin Yue Choy +1 more | 2024-02-27 |
| 11515179 | Semiconductor processing chamber multistage mixing apparatus | Dongqing Yang | 2022-11-29 |
| 11361939 | Semiconductor processing chamber for multiple precursor flow | Dongqing Yang, Dmitry Lubomirsky, Peter M. Hillman, Soonam Park, Martin Yue Choy +1 more | 2022-06-14 |
| 11276590 | Multi-zone semiconductor substrate supports | Dongqing Yang, Dmitry Lubomirsky, Peter M. Hillman, Soonam Park, Martin Yue Choy +1 more | 2022-03-15 |
| 11276559 | Semiconductor processing chamber for multiple precursor flow | Dongqing Yang, Dmitry Lubomirsky, Peter M. Hillman, Soonam Park, Martin Yue Choy +1 more | 2022-03-15 |
| 11060203 | Liner for epi chamber | Shu-Kwan LAU, Aaron Miller | 2021-07-13 |
| 10964512 | Semiconductor processing chamber multistage mixing apparatus and methods | Dongqing Yang, Dmitry Lubomirsky | 2021-03-30 |
| 10923386 | Processing chamber | — | 2021-02-16 |
| 10837121 | Susceptor support | Richard O. Collins, Errol Antonio C. Sanchez, David K. Carlson | 2020-11-17 |
| 10829855 | Gas distribution showerhead for semiconductor processing | Anh N. Nguyen, Dmitry Lubomirsky | 2020-11-10 |
| 10781533 | Batch processing chamber | — | 2020-09-22 |
| 10760161 | Inject insert for EPI chamber | Shu-Kwan LAU, Aaron Miller | 2020-09-01 |
| 10699921 | Semiconductor processing chamber multistage mixing apparatus | Dongqing Yang | 2020-06-30 |
| 10679870 | Semiconductor processing chamber multistage mixing apparatus | Dongqing Yang | 2020-06-09 |
| 10672642 | Systems and methods for pedestal configuration | Paneendra Prakash Bhat, Nikolai Kalnin | 2020-06-02 |
| 10577690 | Gas distribution showerhead for semiconductor processing | Anh N. Nguyen, Dmitry Lubomirsky | 2020-03-03 |
| 10453733 | Substrate transfer mechanisms | Masato Ishii, Shu-Kwan LAU, Jeffrey Tobin | 2019-10-22 |
| 10356848 | Lamp heating for process chamber | Schubert S. Chu | 2019-07-16 |
| 10170342 | Flow controlled liner having spatially distributed gas passages | Shu-Kwan LAU | 2019-01-01 |
| 10132003 | Heating modulators to improve epi uniformity tuning | Shu-Kwan LAU, Surajit Kumar, Joseph M. Ranish, Zhiyuan Ye, Kartik Shah +1 more | 2018-11-20 |
| 10119192 | EPI base ring | Steve Aboagye, Paul Brillhart, Surajit Kumar, Anzhong Chang, Satheesh Kuppurao +1 more | 2018-11-06 |
| 10077508 | Multizone control of lamps in a conical lamphead using pyrometers | Joseph M. Ranish, Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran +1 more | 2018-09-18 |
| 9905454 | Substrate transfer mechanisms | Masato Ishii, Shu-Kwan LAU, Jeffrey Tobin | 2018-02-27 |
| 9870919 | Process chamber having separate process gas and purge gas regions | Joseph M. Ranish, Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran +1 more | 2018-01-16 |
| 9842748 | Flow controlled liner having spatially distributed gas passages | Shu-Kwan LAU | 2017-12-12 |