Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12002659 | Apparatus for generating etchants for remote plasma processes | Tae Seung Cho, David Benjaminson, Kenneth D. Schatz, Ryan Pakulski, Pratheep Gunaseelan +1 more | 2024-06-04 |
| 11915950 | Multi-zone semiconductor substrate supports | Mehmet Tugrul Samir, Dongqing Yang, Dmitry Lubomirsky, Peter M. Hillman, Soonam Park +1 more | 2024-02-27 |
| 11735441 | Systems and methods for improved semiconductor etching and component protection | Tien Fak Tan, Lok Kee Loh, Dmitry Lubomirsky, Soonwook Jung, Soonam Park | 2023-08-22 |
| 11361939 | Semiconductor processing chamber for multiple precursor flow | Mehmet Tugrul Samir, Dongqing Yang, Dmitry Lubomirsky, Peter M. Hillman, Soonam Park +1 more | 2022-06-14 |
| 11276590 | Multi-zone semiconductor substrate supports | Mehmet Tugrul Samir, Dongqing Yang, Dmitry Lubomirsky, Peter M. Hillman, Soonam Park +1 more | 2022-03-15 |
| 11276559 | Semiconductor processing chamber for multiple precursor flow | Mehmet Tugrul Samir, Dongqing Yang, Dmitry Lubomirsky, Peter M. Hillman, Soonam Park +1 more | 2022-03-15 |
| 10522371 | Systems and methods for improved semiconductor etching and component protection | Tien Fak Tan, Lok Kee Loh, Dmitry Lubomirsky, Soonwook Jung, Soonam Park | 2019-12-31 |
| 10504754 | Systems and methods for improved semiconductor etching and component protection | Tien Fak Tan, Lok Kee Loh, Dmitry Lubomirsky, Soonwook Jung, Soonam Park | 2019-12-10 |