Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340979 | Semiconductor processing chamber for improved precursor flow | Tien Fak Tan, Dmitry Lubomirsky, Soonam Park, Raymond W. Lu, Phong Pham +1 more | 2025-06-24 |
| 12310055 | Semiconductor device and method of fabricating the same | Kyungin Choi, Dongmyoung Kim, Haejun Yu, Ki-Hyung Ko, Jiho Yoo | 2025-05-20 |
| 11894217 | Plasma ignition optimization in semiconductor processing chambers | Kenneth D. Schatz | 2024-02-06 |
| 11735441 | Systems and methods for improved semiconductor etching and component protection | Tien Fak Tan, Lok Kee Loh, Dmitry Lubomirsky, Martin Yue Choy, Soonam Park | 2023-08-22 |
| 11587765 | Plasma ignition optimization in semiconductor processing chambers | Kenneth D. Schatz | 2023-02-21 |
| 10607832 | Method and apparatus for forming a thin layer | Junyeong Lee, Bongjin Kuh, Pyung Moon, Sukjin Chung | 2020-03-31 |
| 10593560 | Magnetic induction plasma source for semiconductor processes and equipment | Tae Seung Cho, Junghoon Kim, Satoru Kobayashi, Kenneth D. Schatz, Soonam Park +1 more | 2020-03-17 |
| 10541184 | Optical emission spectroscopic techniques for monitoring etching | Soonam Park, Dmitry Lubomirsky | 2020-01-21 |
| 10522371 | Systems and methods for improved semiconductor etching and component protection | Tien Fak Tan, Lok Kee Loh, Dmitry Lubomirsky, Martin Yue Choy, Soonam Park | 2019-12-31 |
| 10504754 | Systems and methods for improved semiconductor etching and component protection | Tien Fak Tan, Lok Kee Loh, Dmitry Lubomirsky, Martin Yue Choy, Soonam Park | 2019-12-10 |
| 9922840 | Adjustable remote dissociation | Soonam Park, Kenneth D. Schatz, Dmitry Lubomirsky | 2018-03-20 |
| 9874524 | In-situ spatially resolved plasma monitoring by using optical emission spectroscopy | Tae Seung Cho, Junghoon Kim, Soonam Park, Dmitry Lubomirsky | 2018-01-23 |
| 9293336 | Semiconductor device and method of fabricating the same | Sangryol Yang, Kyoungseob Kim, Youngsub You, Byunghong CHUNG, Hanmei Choi | 2016-03-22 |