Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854864 | Semiconductor device including trench isolation layer and method of forming the same | Juyeon KIM, Hanmei Choi, Bongjin Kuh, Changyong Kim, Hakyu Seong | 2023-12-26 |
| 11211284 | Semiconductor device including trench isolation layer and method of forming the same | Juyeon KIM, Hanmei Choi, Bongjin Kuh, Changyong Kim, Hakyu Seong | 2021-12-28 |
| 10844491 | Gas supply unit and substrate processing system | JongCheol Lee, MinHwa Jung, Jaechul Shin, In-Sun Yi, Geunkyu Choi +3 more | 2020-11-24 |
| 10822694 | Substrate processing apparatus and method of cleaning the same | Bongjin Kuh, Kook Tae Kim, In-Sun Yi, Soojin Hong | 2020-11-03 |
| 10607832 | Method and apparatus for forming a thin layer | Junyeong Lee, Soonwook Jung, Bongjin Kuh, Pyung Moon | 2020-03-31 |
| 9951422 | Semiconductor device manufacturing apparatus having plurality of gas exhausting pipes and gas sensors | Jaechul Shin, JongCheol Lee, Geunkyu Choi, MinHwa Jung | 2018-04-24 |
| 9082611 | Methods of forming a layer | JongCheol Lee, Younsoo Kim, Chayoung Yoo, Geunkyu Choi | 2015-07-14 |