Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844491 | Gas supply unit and substrate processing system | Sukjin Chung, JongCheol Lee, Jaechul Shin, In-Sun Yi, Geunkyu Choi +3 more | 2020-11-24 |
| 9951422 | Semiconductor device manufacturing apparatus having plurality of gas exhausting pipes and gas sensors | Jaechul Shin, JongCheol Lee, Geunkyu Choi, Sukjin Chung | 2018-04-24 |