Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230514 | Substrate processing apparatus including filling gas supply line and substrate processing method using the same | Byunghwan Kong, Heeyeon Kim, Homin Son | 2025-02-18 |
| 10844491 | Gas supply unit and substrate processing system | Sukjin Chung, JongCheol Lee, MinHwa Jung, Jaechul Shin, In-Sun Yi +3 more | 2020-11-24 |
| 9951422 | Semiconductor device manufacturing apparatus having plurality of gas exhausting pipes and gas sensors | Jaechul Shin, JongCheol Lee, MinHwa Jung, Sukjin Chung | 2018-04-24 |
| 9362137 | Plasma treating apparatus, substrate treating method, and method of manufacturing a semiconductor device | Sungho Kang, Sunyoung Lee, Jaehee Lee, Han Ki Lee | 2016-06-07 |
| 9082611 | Methods of forming a layer | Sukjin Chung, JongCheol Lee, Younsoo Kim, Chayoung Yoo | 2015-07-14 |