Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230514 | Substrate processing apparatus including filling gas supply line and substrate processing method using the same | Heeyeon Kim, Homin Son, Geunkyu Choi | 2025-02-18 |
| 11715653 | Substrate processing apparatus | ByeongHoon Kim, Seungyong Bae, Jaehyun An | 2023-08-01 |