Patents per Year
Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844491 | Gas supply unit and substrate processing system | Sukjin Chung, MinHwa Jung, Jaechul Shin, In-Sun Yi, Geunkyu Choi +3 more | 2020-11-24 |
| 9951422 | Semiconductor device manufacturing apparatus having plurality of gas exhausting pipes and gas sensors | Jaechul Shin, Geunkyu Choi, MinHwa Jung, Sukjin Chung | 2018-04-24 |
| 9082611 | Methods of forming a layer | Sukjin Chung, Younsoo Kim, Chayoung Yoo, Geunkyu Choi | 2015-07-14 |