Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844491 | Gas supply unit and substrate processing system | Sukjin Chung, JongCheol Lee, MinHwa Jung, Jaechul Shin, In-Sun Yi +3 more | 2020-11-24 |
| 8377206 | Apparatus and method of forming semiconductor devices | Youngsoo Park, Myeongjin Kim, Sangyeob Cha, WanGoo Hwang, Youngsam An | 2013-02-19 |