Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844491 | Gas supply unit and substrate processing system | Sukjin Chung, JongCheol Lee, MinHwa Jung, Jaechul Shin, Geunkyu Choi +3 more | 2020-11-24 |
| 10822694 | Substrate processing apparatus and method of cleaning the same | Sukjin Chung, Bongjin Kuh, Kook Tae Kim, Soojin Hong | 2020-11-03 |
| 8642458 | Method of fabricating nonvolatile memory device | Byung-Hong Chung, Young-Hee Kim, Han-Mei Choi | 2014-02-04 |
| 8227357 | Methods of fabricating silicon oxide layers using inorganic silicon precursors and methods of fabricating semiconductor devices including the same | Ki-Hyun Hwang, Jin-Tae Noh, Jae Young Ahn, Si-Young Choi | 2012-07-24 |
| 8114735 | Method of manufacturing a non-volatile memory device | Hong Suk Kim, Si-Young Choi, Ki-Hyun Hwang, Han-Mei Choi, Seung Hwan Lee +3 more | 2012-02-14 |