| 12476094 |
Model-based characterization of plasmas in semiconductor processing systems |
Soon Young Jung, Hung Liang Cho |
2025-11-18 |
|
| 12148597 |
Multi-zone gas distribution systems and methods |
Saravjeet Singh, Alan Tso, Marlin Wijekoon, Dimitri Kioussis |
2024-11-19 |
$80,955,000 |
| 12002659 |
Apparatus for generating etchants for remote plasma processes |
Tae Seung Cho, David Benjaminson, Ryan Pakulski, Martin Yue Choy, Pratheep Gunaseelan +1 more |
2024-06-04 |
$68,807,000 |
| 11915911 |
Two piece electrode assembly with gap for plasma control |
Tien Fak Tan, Saravjeet Singh, Dmitry Lubomirsky, Tae Wan Kim, Tae Seung Cho +1 more |
2024-02-27 |
$57,915,000 |
| 11901161 |
Methods and apparatus for symmetrical hollow cathode electrode and discharge mode for remote plasma processes |
Tae Seung Cho, Saravana Kumar Natarajan, Dmitry Lubomirsky, Samartha Subramanya |
2024-02-13 |
$47,589,000 |
| 11894217 |
Plasma ignition optimization in semiconductor processing chambers |
Soonwook Jung |
2024-02-06 |
$39,056,000 |
| 11715625 |
Semiconductor processing chamber |
Greg Toland, Laksheswar Kalita, Dmitry Lubomirsky |
2023-08-01 |
$66,604,000 |
| 11587765 |
Plasma ignition optimization in semiconductor processing chambers |
Soonwook Jung |
2023-02-21 |
$24,540,000 |
| 11581165 |
Multi-zone gas distribution systems and methods |
Saravjeet Singh, Alan Tso, Marlin Wijekoon, Dimitri Kioussis |
2023-02-14 |
$35,617,000 |
| 11557464 |
Semiconductor chamber coatings and processes |
Laksheswar Kalita, Son T. Nguyen, Dmitry Lubomirsky |
2023-01-17 |
$39,427,000 |
| 11373845 |
Methods and apparatus for symmetrical hollow cathode electrode and discharge mode for remote plasma processes |
Tae Seung Cho, Saravana Kumar Natarajan, Dmitry Lubomirsky, Samartha Subramanya |
2022-06-28 |
$26,475,000 |
| 10903054 |
Multi-zone gas distribution systems and methods |
Saravjeet Singh, Alan Tso, Marlin Wijekoon, Dimitri Kioussis |
2021-01-26 |
$35,448,000 |
| 10699879 |
Two piece electrode assembly with gap for plasma control |
Tien Fak Tan, Saravjeet Singh, Dmitry Lubomirsky, Tae Wan Kim, Tae Seung Cho +1 more |
2020-06-30 |
$26,020,000 |
| 10593560 |
Magnetic induction plasma source for semiconductor processes and equipment |
Tae Seung Cho, Soonwook Jung, Junghoon Kim, Satoru Kobayashi, Soonam Park +1 more |
2020-03-17 |
$17,260,000 |
| 9922840 |
Adjustable remote dissociation |
Soonam Park, Soonwook Jung, Dmitry Lubomirsky |
2018-03-20 |
$37,605,000 |
| 9418328 |
RFID tags and processes for producing RFID tags |
Glenn Gengel, Mark A. Hadley, Tom Pounds, Paul S. Drzaic |
2016-08-16 |
|
| 8912907 |
RFID tags and processes for producing RFID tags |
Glenn Gengel, Mark A. Hadley, Tom Pounds, Paul S. Drzaic |
2014-12-16 |
|
| 8350703 |
RFID tags and processes for producing RFID tags |
Glenn Gengel, Mark A. Hadley, Torn Pounds, Paul S. Drzaic |
2013-01-08 |
|
| 8021841 |
Methods and apparatuses for spatially separating molecules attached to a support and uses in biotechnology |
— |
2011-09-20 |
|
| 7931063 |
Transfer assembly for manufacturing electronic devices |
Gordon S. W. Craig, Mark A. Hadley, Paul S. Drzaic |
2011-04-26 |
|
| 7868766 |
RFID tags and processes for producing RFID tags |
Glenn Gengel, Mark A. Hadley, Tom Pounds, Paul S. Drzaic |
2011-01-11 |
|
| 7745129 |
Methods for sequencing of a necleic acid |
— |
2010-06-29 |
|
| 7542301 |
Creating recessed regions in a substrate and assemblies having such recessed regions |
Lily Liong, Gordon S. W. Craig, Mark A. Hadley, Eric Kanemoto |
2009-06-02 |
|
| 7489248 |
RFID tags and processes for producing RFID tags |
Glenn Gengel, Mark A. Hadley, Tom Pounds, Paul S. Drzaic |
2009-02-10 |
|
| 7321159 |
Method and apparatus for self-assembly of functional blocks on a substrate facilitated by electrode pairs |
— |
2008-01-22 |
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