Issued Patents All Time
Showing 25 most recent of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148597 | Multi-zone gas distribution systems and methods | Saravjeet Singh, Alan Tso, Marlin Wijekoon, Dimitri Kioussis | 2024-11-19 |
| 12002659 | Apparatus for generating etchants for remote plasma processes | Tae Seung Cho, David Benjaminson, Ryan Pakulski, Martin Yue Choy, Pratheep Gunaseelan +1 more | 2024-06-04 |
| 11915911 | Two piece electrode assembly with gap for plasma control | Tien Fak Tan, Saravjeet Singh, Dmitry Lubomirsky, Tae Wan Kim, Tae Seung Cho +1 more | 2024-02-27 |
| 11901161 | Methods and apparatus for symmetrical hollow cathode electrode and discharge mode for remote plasma processes | Tae Seung Cho, Saravana Kumar Natarajan, Dmitry Lubomirsky, Samartha Subramanya | 2024-02-13 |
| 11894217 | Plasma ignition optimization in semiconductor processing chambers | Soonwook Jung | 2024-02-06 |
| 11715625 | Semiconductor processing chamber | Greg Toland, Laksheswar Kalita, Dmitry Lubomirsky | 2023-08-01 |
| 11587765 | Plasma ignition optimization in semiconductor processing chambers | Soonwook Jung | 2023-02-21 |
| 11581165 | Multi-zone gas distribution systems and methods | Saravjeet Singh, Alan Tso, Marlin Wijekoon, Dimitri Kioussis | 2023-02-14 |
| 11557464 | Semiconductor chamber coatings and processes | Laksheswar Kalita, Son T. Nguyen, Dmitry Lubomirsky | 2023-01-17 |
| 11373845 | Methods and apparatus for symmetrical hollow cathode electrode and discharge mode for remote plasma processes | Tae Seung Cho, Saravana Kumar Natarajan, Dmitry Lubomirsky, Samartha Subramanya | 2022-06-28 |
| 10903054 | Multi-zone gas distribution systems and methods | Saravjeet Singh, Alan Tso, Marlin Wijekoon, Dimitri Kioussis | 2021-01-26 |
| 10699879 | Two piece electrode assembly with gap for plasma control | Tien Fak Tan, Saravjeet Singh, Dmitry Lubomirsky, Tae Wan Kim, Tae Seung Cho +1 more | 2020-06-30 |
| 10593560 | Magnetic induction plasma source for semiconductor processes and equipment | Tae Seung Cho, Soonwook Jung, Junghoon Kim, Satoru Kobayashi, Soonam Park +1 more | 2020-03-17 |
| 9922840 | Adjustable remote dissociation | Soonam Park, Soonwook Jung, Dmitry Lubomirsky | 2018-03-20 |
| 9418328 | RFID tags and processes for producing RFID tags | Glenn Gengel, Mark A. Hadley, Tom Pounds, Paul S. Drzaic | 2016-08-16 |
| 8912907 | RFID tags and processes for producing RFID tags | Glenn Gengel, Mark A. Hadley, Tom Pounds, Paul S. Drzaic | 2014-12-16 |
| 8350703 | RFID tags and processes for producing RFID tags | Glenn Gengel, Mark A. Hadley, Torn Pounds, Paul S. Drzaic | 2013-01-08 |
| 8021841 | Methods and apparatuses for spatially separating molecules attached to a support and uses in biotechnology | — | 2011-09-20 |
| 7931063 | Transfer assembly for manufacturing electronic devices | Gordon S. W. Craig, Mark A. Hadley, Paul S. Drzaic | 2011-04-26 |
| 7868766 | RFID tags and processes for producing RFID tags | Glenn Gengel, Mark A. Hadley, Tom Pounds, Paul S. Drzaic | 2011-01-11 |
| 7745129 | Methods for sequencing of a necleic acid | — | 2010-06-29 |
| 7542301 | Creating recessed regions in a substrate and assemblies having such recessed regions | Lily Liong, Gordon S. W. Craig, Mark A. Hadley, Eric Kanemoto | 2009-06-02 |
| 7489248 | RFID tags and processes for producing RFID tags | Glenn Gengel, Mark A. Hadley, Tom Pounds, Paul S. Drzaic | 2009-02-10 |
| 7321159 | Method and apparatus for self-assembly of functional blocks on a substrate facilitated by electrode pairs | — | 2008-01-22 |
| 7253735 | RFID tags and processes for producing RFID tags | Glenn Gengel, Mark A. Hadley, Tom Pounds, Paul S. Drzaic | 2007-08-07 |