Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362150 | Semiconductor chamber components with advanced coating techniques | Laksheswar Kalita, Joseph Behnke, Christopher Laurent Beaudry, Jonathan Strahle | 2025-07-15 |
| 12002659 | Apparatus for generating etchants for remote plasma processes | Tae Seung Cho, David Benjaminson, Kenneth D. Schatz, Martin Yue Choy, Pratheep Gunaseelan +1 more | 2024-06-04 |
| 11515127 | End effectors for moving workpieces and replaceable parts within a system for processing workpieces under vacuum | Martin L. Zucker, Peter J. Lembesis | 2022-11-29 |
| 11508560 | Focus ring adjustment assembly of a system for processing workpieces under vacuum | Martin L. Zucker, Peter J. Lembesis, Shawming Ma | 2022-11-22 |
| 11348767 | Plasma processing apparatus having a focus ring adjustment assembly | Martin L. Zucker, Peter J. Lembesis, Shawming Ma | 2022-05-31 |
| 11257696 | Systems and methods for workpiece processing | Michael X. Yang | 2022-02-22 |
| 11201036 | Plasma strip tool with uniformity control | Shawming Ma, Vladimir Nagorny, Dixit V. Desai | 2021-12-14 |
| 10790119 | Plasma processing apparatus with post plasma gas injection | Shawming Ma, Vladimir Nagorny, Dixit V. Desai | 2020-09-29 |
| 10580672 | Systems and methods for workpiece processing | Michael X. Yang | 2020-03-03 |
| 9184072 | Advanced multi-workpiece processing chamber | Daniel J. Devine, Charles Crapuchettes, Dixit V. Desai, Rene George, Vincent Lee +4 more | 2015-11-10 |
| 8668422 | Low cost high throughput processing platform | Leszek Niewmierzycki, David A. Barker, Daniel J. Devine, Michael Kuhlman, Hongqing Shan +1 more | 2014-03-11 |
| 7658586 | Advanced low cost high throughput processing platform | Leszek Niewmierzycki, David A. Barker, Michael Kuhlman, Hongqing Shan, Martin L. Zucker | 2010-02-09 |
| 7563068 | Low cost high throughput processing platform | Leszek Niewmierzycki, David A. Barker, Daniel J. Devine, Michael Kuhlman, Hongqing Shan +1 more | 2009-07-21 |