Issued Patents All Time
Showing 25 most recent of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12399064 | Systems and methods for thermal processing and temperature measurement of a workpiece at low temperatures | Rolf Bremensdorfer, Markus Lieberer, Paul Janis Timans | 2025-08-26 |
| 12400916 | Transmission-based temperature measurement of a workpiece in a thermal processing system | Michael Storek, Rolf Bremensdorfer, Markus Lieberer | 2025-08-26 |
| 12183558 | Workpiece processing apparatus with thermal processing systems | Dixit V. Desai, Alex Wansidler, Dieter Hezler, Joseph Cibere, Rolf Bremensdorfer +1 more | 2024-12-31 |
| 12174616 | Control system for adaptive control of a thermal processing system | Markus Lieberer, Joseph Cibere | 2024-12-24 |
| 12119216 | Arc lamp with forming gas for thermal processing systems | Rolf Bremensdorfer, Dave Camm, Joseph Cibere, Dieter Hezler, Shawming Ma +1 more | 2024-10-15 |
| 12080568 | Support plate for localized heating in thermal processing systems | Rolf Bremensdorfer, Johannes Keppler, Thorsten Hülsmann | 2024-09-03 |
| 12014920 | Apparatus for hydrogen assisted atmospheric radical oxidation | Christian Pfahler, Alexandr Cosceev | 2024-06-18 |
| 11955388 | Transmission-based temperature measurement of a workpiece in a thermal processing system | Michael Storek, Rolf Bremensdorfer, Markus Lieberer | 2024-04-09 |
| 11923215 | Systems and methods for workpiece processing | — | 2024-03-05 |
| 11837447 | Workpiece processing apparatus with plasma and thermal processing systems | Dixit V. Desai, Alex Wansidler, Dieter Hezler, Joseph Cibere, Rolf Bremensdorfer +1 more | 2023-12-05 |
| 11812523 | Thermal processing system with transmission switch plate | Rolf Bremensdorfer | 2023-11-07 |
| 11791181 | Methods for the treatment of workpieces | Ting Xie, Hua Chung, Haochen Li, Xinliang Lu, Shawming Ma +1 more | 2023-10-17 |
| 11791166 | Selective etch process using hydrofluoric acid and ozone gases | Qi Zhang, Haichun Yang, Hua Chung, Ting Xie | 2023-10-17 |
| 11764072 | Method for processing a workpiece using a multi-cycle thermal treatment process | Shawming Ma | 2023-09-19 |
| 11721539 | Arc lamp with forming gas for thermal processing systems | Rolf Bremensdorfer, Dave Camm, Joseph Cibere, Dieter Hezler, Shawming Ma +1 more | 2023-08-08 |
| 11699603 | Thermal processing system with temperature non-uniformity control | Chen-An Chen | 2023-07-11 |
| 11644817 | Control system for adaptive control of a thermal processing system | Markus Lieberer, Joseph Cibere | 2023-05-09 |
| 11610824 | Transmission-based temperature measurement of a workpiece in a thermal processing system | Michael Storek, Rolf Bremensdorfer, Markus Lieberer | 2023-03-21 |
| 11586113 | Methods and apparatus for post exposure bake processing of a workpiece | — | 2023-02-21 |
| 11521847 | Hydrogen assisted atmospheric radical oxidation | Christian Pfahler, Alexandr Cosceev | 2022-12-06 |
| 11521868 | Support plate for localized heating in thermal processing systems | Rolf Bremensdorfer, Johannes Keppler, Thorsten Hülsmann | 2022-12-06 |
| 11495456 | Ozone for selective hydrophilic surface treatment | Ting Xie, Xinliang Lu, Hua Chung | 2022-11-08 |
| 11495437 | Surface pretreatment process to improve quality of oxide films produced by remote plasma | Ting Xie, Xinliang Lu, Hua Chung | 2022-11-08 |
| 11482434 | Systems and methods for workpiece processing | — | 2022-10-25 |
| 11462413 | Processing of workpieces using deposition process and etch process | Shanyu Wang, Chun Yan, Hua Chung, Tsai Wen Sung, Qi Zhang | 2022-10-04 |