| 12399064 |
Systems and methods for thermal processing and temperature measurement of a workpiece at low temperatures |
Rolf Bremensdorfer, Markus Lieberer, Paul Janis Timans |
2025-08-26 |
|
| 12400916 |
Transmission-based temperature measurement of a workpiece in a thermal processing system |
Michael Storek, Rolf Bremensdorfer, Markus Lieberer |
2025-08-26 |
|
| 12183558 |
Workpiece processing apparatus with thermal processing systems |
Dixit V. Desai, Alex Wansidler, Dieter Hezler, Joseph Cibere, Rolf Bremensdorfer +1 more |
2024-12-31 |
|
| 12174616 |
Control system for adaptive control of a thermal processing system |
Markus Lieberer, Joseph Cibere |
2024-12-24 |
|
| 12119216 |
Arc lamp with forming gas for thermal processing systems |
Rolf Bremensdorfer, Dave Camm, Joseph Cibere, Dieter Hezler, Shawming Ma +1 more |
2024-10-15 |
|
| 12080568 |
Support plate for localized heating in thermal processing systems |
Rolf Bremensdorfer, Johannes Keppler, Thorsten Hülsmann |
2024-09-03 |
|
| 12014920 |
Apparatus for hydrogen assisted atmospheric radical oxidation |
Christian Pfahler, Alexandr Cosceev |
2024-06-18 |
|
| 11955388 |
Transmission-based temperature measurement of a workpiece in a thermal processing system |
Michael Storek, Rolf Bremensdorfer, Markus Lieberer |
2024-04-09 |
|
| 11923215 |
Systems and methods for workpiece processing |
— |
2024-03-05 |
|
| 11837447 |
Workpiece processing apparatus with plasma and thermal processing systems |
Dixit V. Desai, Alex Wansidler, Dieter Hezler, Joseph Cibere, Rolf Bremensdorfer +1 more |
2023-12-05 |
|
| 11812523 |
Thermal processing system with transmission switch plate |
Rolf Bremensdorfer |
2023-11-07 |
|
| 11791181 |
Methods for the treatment of workpieces |
Ting Xie, Hua Chung, Haochen Li, Xinliang Lu, Shawming Ma +1 more |
2023-10-17 |
|
| 11791166 |
Selective etch process using hydrofluoric acid and ozone gases |
Qi Zhang, Haichun Yang, Hua Chung, Ting Xie |
2023-10-17 |
|
| 11764072 |
Method for processing a workpiece using a multi-cycle thermal treatment process |
Shawming Ma |
2023-09-19 |
|
| 11721539 |
Arc lamp with forming gas for thermal processing systems |
Rolf Bremensdorfer, Dave Camm, Joseph Cibere, Dieter Hezler, Shawming Ma +1 more |
2023-08-08 |
|
| 11699603 |
Thermal processing system with temperature non-uniformity control |
Chen-An Chen |
2023-07-11 |
|
| 11644817 |
Control system for adaptive control of a thermal processing system |
Markus Lieberer, Joseph Cibere |
2023-05-09 |
|
| 11610824 |
Transmission-based temperature measurement of a workpiece in a thermal processing system |
Michael Storek, Rolf Bremensdorfer, Markus Lieberer |
2023-03-21 |
|
| 11586113 |
Methods and apparatus for post exposure bake processing of a workpiece |
— |
2023-02-21 |
|
| 11521847 |
Hydrogen assisted atmospheric radical oxidation |
Christian Pfahler, Alexandr Cosceev |
2022-12-06 |
|
| 11521868 |
Support plate for localized heating in thermal processing systems |
Rolf Bremensdorfer, Johannes Keppler, Thorsten Hülsmann |
2022-12-06 |
|
| 11495456 |
Ozone for selective hydrophilic surface treatment |
Ting Xie, Xinliang Lu, Hua Chung |
2022-11-08 |
|
| 11495437 |
Surface pretreatment process to improve quality of oxide films produced by remote plasma |
Ting Xie, Xinliang Lu, Hua Chung |
2022-11-08 |
|
| 11482434 |
Systems and methods for workpiece processing |
— |
2022-10-25 |
|
| 11462413 |
Processing of workpieces using deposition process and etch process |
Shanyu Wang, Chun Yan, Hua Chung, Tsai Wen Sung, Qi Zhang |
2022-10-04 |
|