Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791181 | Methods for the treatment of workpieces | Ting Xie, Hua Chung, Xinliang Lu, Shawming Ma, Haichun Yang +1 more | 2023-10-17 |
| 10964528 | Integration of materials removal and surface treatment in semiconductor device fabrication | Michael X. Yang, Hua Chung, Xinliang Lu, Ting Xie, Qi Zhang | 2021-03-30 |
| 10403492 | Integration of materials removal and surface treatment in semiconductor device fabrication | Michael X. Yang, Hua Chung, Xinliang Lu, Ting Xie, Qi Zhang | 2019-09-03 |