Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791181 | Methods for the treatment of workpieces | Ting Xie, Hua Chung, Haochen Li, Xinliang Lu, Shawming Ma +1 more | 2023-10-17 |
| 11791166 | Selective etch process using hydrofluoric acid and ozone gases | Qi Zhang, Hua Chung, Ting Xie, Michael X. Yang | 2023-10-17 |
| 11315801 | Processing of workpieces using ozone gas and hydrogen radicals | Qi Zhang, Hua Chung, Michael X. Yang | 2022-04-26 |
| 11251050 | Silicon oxide selective dry etch process | Qi Zhang, Xinliang Lu, Hua Chung | 2022-02-15 |
| 11183397 | Selective etch process using hydrofluoric acid and ozone gases | Qi Zhang, Hua Chung, Ting Xie, Michael X. Yang | 2021-11-23 |
| 11164727 | Processing of workpieces using hydrogen radicals and ozone gas | Ting Xie, Hua Chung, Bin Dong, Xinliang Lu, Michael X. Yang | 2021-11-02 |
| 10692730 | Silicon oxide selective dry etch process | Qi Zhang, Xinliang Lu, Hua Chung | 2020-06-23 |
| 8318605 | Plasma treatment method for preventing defects in doped silicon oxide surfaces during exposure to atmosphere | Chien-Teh Kao, Xinliang Lu, Mei Chang | 2012-11-27 |
| 8252696 | Selective etching of silicon nitride | Xinliang Lu, Zhenbin Ge, Nan Lu, David T. Or, Chien-Teh Kao +1 more | 2012-08-28 |
| 7989339 | Vapor deposition processes for tantalum carbide nitride materials | Kavita Shah, Schubert S. Chu | 2011-08-02 |
| 7977246 | Thermal annealing method for preventing defects in doped silicon oxide surfaces during exposure to atmosphere | Chien-Teh Kao, Xinliang Lu, Mei Chang | 2011-07-12 |
| 7871926 | Methods and systems for forming at least one dielectric layer | Li-Qun Xia, Mihaela Balseanu, Victor Nguyen, Derek R. Witty, Hichem M'Saad +3 more | 2011-01-18 |
| 7780793 | Passivation layer formation by plasma clean process to reduce native oxide growth | Xinliang Lu, Chien-Teh Kao, Mei Chang | 2010-08-24 |
| 7678298 | Tantalum carbide nitride materials by vapor deposition processes | Kavita Shah, Schubert S. Chu | 2010-03-16 |
| 7585762 | Vapor deposition processes for tantalum carbide nitride materials | Kavita Shah, Schubert S. Chu | 2009-09-08 |