| 10236182 |
Conformal amorphous carbon for spacer and spacer protection applications |
Sungjin Kim, Deenesh Padhi, Sung Hyun Hong, Bok Hoen Kim |
2019-03-19 |
$17,059,000 |
| 10074534 |
Ultra-conformal carbon film deposition |
Swayambhu Prasad Behera, Shahid Shaikh, Pramit Manna, Mandar B. Pandit, Tersem Summan +4 more |
2018-09-11 |
$27,448,000 |
| 9984868 |
PEALD of films comprising silicon nitride |
Victor Nguyen, Woong Jae Lee, Mihaela Balseanu, Li-Qun Xia |
2018-05-29 |
$37,048,000 |
| 9721784 |
Ultra-conformal carbon film deposition |
Swayambhu Prasad Behera, Shahid Shaikh, Pramit Manna, Mandar B. Pandit, Tersem Summan +4 more |
2017-08-01 |
$22,439,000 |
| 9570303 |
Conformal amorphous carbon for spacer and spacer protection applications |
Sungjin Kim, Deenesh Padhi, Sung Hyun Hong, Bok Hoen Kim |
2017-02-14 |
$30,741,000 |
| 9337072 |
Apparatus and method for substrate clamping in a plasma chamber |
Ganesh Balasubramanian, Amit Kumar BANSAL, Eller Y. Juco, Mohamad A. Ayoub, Hyung Joon Kim +11 more |
2016-05-10 |
$10,962,000 |
| 8758638 |
Copper oxide removal techniques |
Weifeng YE, Victor Nguyen, Mei-Yee Shek, Mihaela Balseanu, Li-Qun Xia |
2014-06-24 |
$13,917,000 |
| 8679987 |
Deposition of an amorphous carbon layer with high film density and high etch selectivity |
Patrick Reilly, Shahid Shaikh, Tersem Summan, Deenesh Padhi, Sanjeev Baluja +3 more |
2014-03-25 |
$18,865,000 |
| 8598020 |
Plasma-enhanced chemical vapor deposition of crystalline germanium |
Victor Nguyen, Mihaela Balseanu, Li-Qun Xia |
2013-12-03 |
$15,303,000 |
| 8586487 |
Low temperature plasma enhanced chemical vapor deposition of conformal silicon carbon nitride and silicon nitride films |
Victor Nguyen, Mihaela Balseanu, Li-Qun Xia |
2013-11-19 |
$10,370,000 |
| 8563090 |
Boron film interface engineering |
Mihaela Balseanu, Li-Qun Xia, Yi-Hsing Chen |
2013-10-22 |
$10,239,000 |
| 8501568 |
Method of forming flash memory with ultraviolet treatment |
Mihaela Balseanu, Vladimir Zubkov, Li-Qun Xia, Atif Noori, Reza Arghavani +1 more |
2013-08-06 |
$5,239,000 |
| 8445075 |
Method to minimize wet etch undercuts and provide pore sealing of extreme low k (k<2.5) dielectrics |
Huiwen Xu, Mei-Yee Shek, Li-Qun Xia, Amir Al-Bayati, Hichem M'Saad |
2013-05-21 |
$14,657,000 |
| 8389376 |
Air gap integration scheme |
Alexandros T. Demos, Li-Qun Xia, Bok Hoen Kim, Hichem M'Saad |
2013-03-05 |
$7,679,000 |
| 8343881 |
Silicon dioxide layer deposited with BDEAS |
Yong Won Lee, Vladimir Zubkov, Mei-Yee Shek, Li-Qun Xia, Prahallad Iyengar +4 more |
2013-01-01 |
|
| 8337950 |
Method for depositing boron-rich films for lithographic mask applications |
Victor Nguyen, Yi-Hsing Chen, Mihaela Balseanu, Isabelita Roflox, Li-Qun Xia |
2012-12-25 |
|
| 8282734 |
Methods to improve the in-film defectivity of PECVD amorphous carbon films |
Deenesh Padhi, Chiu Chan, Sudha Rathi, Ganesh Balasubramanian, Jianhua Zhou +4 more |
2012-10-09 |
$6,230,000 |
| 8252653 |
Method of forming a non-volatile memory having a silicon nitride charge trap layer |
Mihaela Balseanu, Vladimir Zubkov, Li-Qun Xia, Atif Noori, Reza Arghavani +1 more |
2012-08-28 |
$5,542,000 |
| 8148269 |
Boron nitride and boron-nitride derived materials deposition method |
Mihaela Balseanu, Christopher Dennis Bencher, Yongmei Chen, Li Yan Miao, Victor Nguyen +2 more |
2012-04-03 |
$7,743,000 |
| 8138104 |
Method to increase silicon nitride tensile stress using nitrogen plasma in-situ treatment and ex-situ UV cure |
Mihaela Balseanu, Victor Nguyen, Li-Qun Xia, Hichem M'Saad, Mei-Yee Shek +1 more |
2012-03-20 |
$11,903,000 |
| 8084105 |
Method of depositing boron nitride and boron nitride-derived materials |
Jeong-Uk Huh, Mihaela Balseanu, Li-Qun Xia, Victor Nguyen, Hichem M'Saad |
2011-12-27 |
$8,284,000 |
| 7964442 |
Methods to obtain low k dielectric barrier with superior etch resistivity |
Huiwen Xu, Yijun Liu, Li-Qun Xia, Hichem M'Saad |
2011-06-21 |
$5,178,000 |
| 7871926 |
Methods and systems for forming at least one dielectric layer |
Li-Qun Xia, Mihaela Balseanu, Victor Nguyen, Hichem M'Saad, Haichun Yang +3 more |
2011-01-18 |
$15,285,000 |
| 7867578 |
Method for depositing an amorphous carbon film with improved density and step coverage |
Deenesh Padhi, Hyoung-Chan Ha, Sudha Rathi, Chiu Chan, Sohyun Park +6 more |
2011-01-11 |
$9,486,000 |
| 7816205 |
Method of forming non-volatile memory having charge trap layer with compositional gradient |
Mihaela Balseanu, Vladimir Zubkov, Li-Qun Xia, Atif Noori, Reza Arghavani +1 more |
2010-10-19 |
$11,079,000 |
