| 11898249 |
PECVD process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more |
2024-02-13 |
$47,589,000 |
| 11613812 |
PECVD process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more |
2023-03-28 |
$69,791,000 |
| 10793954 |
PECVD process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more |
2020-10-06 |
$62,697,000 |
| 10074534 |
Ultra-conformal carbon film deposition |
Swayambhu Prasad Behera, Shahid Shaikh, Pramit Manna, Mandar B. Pandit, Tersem Summan +4 more |
2018-09-11 |
$27,448,000 |
| 10060032 |
PECVD process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more |
2018-08-28 |
$23,630,000 |
| 10030306 |
PECVD apparatus and process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more |
2018-07-24 |
$37,876,000 |
| 9816187 |
PECVD process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more |
2017-11-14 |
$27,960,000 |
| 9748093 |
Pulsed nitride encapsulation |
David Alan Bethke, Mihaela Balseanu |
2017-08-29 |
$19,098,000 |
| 9721784 |
Ultra-conformal carbon film deposition |
Swayambhu Prasad Behera, Shahid Shaikh, Pramit Manna, Mandar B. Pandit, Tersem Summan +4 more |
2017-08-01 |
$22,439,000 |
| 9646818 |
Method of forming planar carbon layer by applying plasma power to a combination of hydrocarbon precursor and hydrogen-containing precursor |
David Alan Bethke, Kwangduk Douglas Lee |
2017-05-09 |
$25,128,000 |
| 9458537 |
PECVD process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more |
2016-10-04 |
$14,162,000 |
| 9157730 |
PECVD process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more |
2015-10-13 |
$9,629,000 |
| 8778813 |
Confined process volume PECVD chamber |
Ramprakash Sankarakrishnan, Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Dale R. Du Bois, Mark Fodor +6 more |
2014-07-15 |
$20,143,000 |
| 8679987 |
Deposition of an amorphous carbon layer with high film density and high etch selectivity |
Shahid Shaikh, Tersem Summan, Deenesh Padhi, Sanjeev Baluja, Juan Carlos Rocha-Alvarez +3 more |
2014-03-25 |
$18,865,000 |
| 8513129 |
Planarizing etch hardmask to increase pattern density and aspect ratio |
Martin Jay Seamons, Kwangduk Douglas Lee, Chiu Chan, Sudha Rathi |
2013-08-20 |
$8,967,000 |
