| 12195846 |
Modified stacks for 3D NAND |
Xinhai Han, Hang Yu, Kesong Hu, Kristopher Enslow, Wenjiao Wang +9 more |
2025-01-14 |
| 12110590 |
Faceplate having a curved surface |
Shailendra Srivastava, Sai Susmita Addepalli, Nikhil Sudhindrarao Jorapur, Daemian Raj Benjamin Raj, Amit Kumar BANSAL +5 more |
2024-10-08 |
| 11898249 |
PECVD process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Zhijun Jiang, Juan Carlos Rocha-Alvarez +17 more |
2024-02-13 |
| 11851759 |
Faceplate having a curved surface |
Shailendra Srivastava, Sai Susmita Addepalli, Nikhil Sudhindrarao Jorapur, Daemian Raj Benjamin Raj, Amit Kumar BANSAL +5 more |
2023-12-26 |
| 11613812 |
PECVD process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Zhijun Jiang, Juan Carlos Rocha-Alvarez +17 more |
2023-03-28 |
| 11530482 |
Faceplate having a curved surface |
Shailendra Srivastava, Sai Susmita Addepalli, Nikhil Sudhindrarao Jorapur, Daemian Raj Benjamin Raj, Amit Kumar BANSAL +5 more |
2022-12-20 |
| 11339475 |
Film stack overlay improvement |
Xinhai Han, Deenesh Padhi, Daemian Raj Benjamin Raj, Kristopher Enslow, Wenjiao Wang +8 more |
2022-05-24 |
| 11276569 |
On stack overlay improvement for 3D NAND |
Yongjing Lin, Tza-Jing Gung, Yusheng Zhou, Xinhai Han, Deenesh Padhi +3 more |
2022-03-15 |
| 10793954 |
PECVD process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Zhijun Jiang, Juan Carlos Rocha-Alvarez +17 more |
2020-10-06 |
| 10790140 |
High deposition rate and high quality nitride |
Xinhai Han, Deenesh Padhi, Yinan Zhang, Shaunak Mukherjee |
2020-09-29 |
| 10276353 |
Dual-channel showerhead for formation of film stacks |
Kaushik Alayavalli, Xinhai Han, Praket P. Jha, Zhijun Jiang, Allen Ko +6 more |
2019-04-30 |
| 10060032 |
PECVD process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Zhijun Jiang, Juan Carlos Rocha-Alvarez +17 more |
2018-08-28 |
| 10030306 |
PECVD apparatus and process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Zhijun Jiang, Juan Carlos Rocha-Alvarez +17 more |
2018-07-24 |
| 9816187 |
PECVD process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Zhijun Jiang, Juan Carlos Rocha-Alvarez +17 more |
2017-11-14 |
| 9458537 |
PECVD process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Zhijun Jiang, Juan Carlos Rocha-Alvarez +17 more |
2016-10-04 |
| 9157730 |
PECVD process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Zhijun Jiang, Juan Carlos Rocha-Alvarez +17 more |
2015-10-13 |
