Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266560 | Film thickness uniformity improvement using edge ring and bias electrode geometry | Kin Pong Lo, Vladimir Nagorny, Wei Liu, Theresa Kramer Guarini, Bernard L. Hwang +2 more | 2025-04-01 |
| D1034491 | Edge ring | Kin Pong Lo, Vladimir Nagorny, Wei Liu, Theresa Kramer Guarini, Bernard L. Hwang +2 more | 2024-07-09 |
| 11380575 | Film thickness uniformity improvement using edge ring and bias electrode geometry | Kin Pong Lo, Vladimir Nagorny, Wei Liu, Theresa Kramer Guarini, Bernard L. Hwang +2 more | 2022-07-05 |
| 10403535 | Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system | Zheng John Ye, Jay D. Pinson, II, Hiroji Hanawa, Jianhua Zhou, Xing Lin +11 more | 2019-09-03 |
| 10325800 | High temperature electrostatic chucking with dielectric constant engineered in-situ charge trap materials | Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Bok Hoen Kim, Zheng John Ye, Ganesh Balasubramanian +2 more | 2019-06-18 |
| 10074534 | Ultra-conformal carbon film deposition | Shahid Shaikh, Pramit Manna, Mandar B. Pandit, Tersem Summan, Patrick Reilly +4 more | 2018-09-11 |
| 9721784 | Ultra-conformal carbon film deposition | Shahid Shaikh, Pramit Manna, Mandar B. Pandit, Tersem Summan, Patrick Reilly +4 more | 2017-08-01 |