Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10074534 | Ultra-conformal carbon film deposition | Swayambhu Prasad Behera, Shahid Shaikh, Pramit Manna, Mandar B. Pandit, Patrick Reilly +4 more | 2018-09-11 |
| 9721784 | Ultra-conformal carbon film deposition | Swayambhu Prasad Behera, Shahid Shaikh, Pramit Manna, Mandar B. Pandit, Patrick Reilly +4 more | 2017-08-01 |
| 8679987 | Deposition of an amorphous carbon layer with high film density and high etch selectivity | Patrick Reilly, Shahid Shaikh, Deenesh Padhi, Sanjeev Baluja, Juan Carlos Rocha-Alvarez +3 more | 2014-03-25 |
| 8097082 | Nonplanar faceplate for a plasma processing chamber | Jianhua Zhou, Deenesh Padhi, Karthik Janakiraman, Hang Yu, Siu F. Cheng +1 more | 2012-01-17 |