Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Nonplanar faceplate for a plasma processing chamber

Nonplanar faceplate for a plasma processing chamber

US Patent 8097082 · Granted Jan 17, 2012

Estimated economic value: $12,497,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Processes for depositing SiB films2025
Ion implantation for reduced hydrogen incorporation in amorphous silicon2025
PECVD of SiBN thin films with low leakage current2025
PECVD of SiBN thin films with low leakage current2025
Decompression toy2025
Steel sheet for hot-dip galvanizing, hot-dip galvanized steel sheet, and alloyed2025
Silicon oxide gap fill using capacitively coupled plasmas2025
Silicon oxide gap fill using capacitively coupled plasmas2025
Data storage method and flash device for allocating a physical address based on 2025
Multi-antenna unit for large area inductively coupled plasma processing apparatu2025
Impedance control of local areas of a substrate during plasma deposition thereon2025
Systems and methods of seasoning electrostatic chucks with dielectric seasoning 2025